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<br />;;ROUtvD WAFER F[ELO DATA <br />--------------------------------------- PR.JSPELT=00B -1ULE=~U-5 <br />--------------------------------------------- <br />BUfINUM MONTH UAY YEAR TIME INSTiYPE PSl DEP1H TEM° PH LLtCCOivD r7F.MeitKS <br />U 9 L al 1330 0 . lL,z <br />U l0 2L ~) lOLS O . 1L.5 <br />u 11 ~ al lol~ o 1L.7 <br />u lz e a) ln5o o 1L.y <br />U I a 92 11>0 0 . 1L.3 <br />U ? lb aL 1315 0 1L.0 <br />u 1 I1 d[ 1133 ~ . 10.9 <br />U 4 1 9L lOS'l 0 . ll.t <br />V 5 ll 81 1010 0 7.1 . , <br />u h 79 AL lOZO 0 9,l , <br />u 7 71 9L 11J5 ~ , . . i__,Sr <br />